Project leader

CEA LETI

Partners

MOVEA, IM2NP, NEEL, CEA SPEC

Funders

ANR,

CAPUCINE

Multi-function Nanofil Silicon Sensor.


This industrial research program aims at producing a 6-axis sensor (3-axis accelerometer and 3-axis magnetometer, called 3A3M), based on an innovative concept and advanced microelectronic technology using silicon nanowires.

The main objective is the design and technological realization of ultra-low power and ultra-miniaturized 3A3M sensors, having a lower cost than existing MEMS sensors (Hall effect sensor, and capacitive MEMS accelerometer), and with significantly improved performances, notably consumption, accuracy, measurement range, and ease of assembly.

Our focus is on consumer markets such as motion capture for applications related to health, sports, recreation and mobile telephony. As such, a lot of demonstrators targeting these markets will be designed, realized and characterized during this project.

Project leader

CEA LETI

Partners

MOVEA, IM2NP, NEEL, CEA SPEC

Funders

ANR,
Themes Markets R&D Investment Duration Funding Year
Networks and Mobile Services, M2M & IOT
Microelectronics
Particular services
Health - Medical - Pharmaceutical
2723 K€ 15 months 2009
Themes
Networks and Mobile Services, M2M & IOT
Microelectronics
Markets
Particular services
Health - Medical - Pharmaceutical
R&D Investment
2723 K€
Duration
15 months
Funding Year
2009

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