Project directory

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SUPER SWITCH

Design of new high voltage power switches at SuperJunction.

The objective of the project is to design the power switches of the future (diodes and MOS Superjunction), high voltage, high current, high frequency, low losses and low cost, based on complementary skills LAAS-CNRS laboratories, LMP and IMS and the company IBS. The critical steps of the process will be studied: deep etching, doping along the trenches and filling them with a suitable dielectric. The influence of these steps on electrical and thermal performance will also be studied. The “process” simulations will make it possible to define the optimal process for manufacturing these components. Finally, DT-SJDIodes, DT-SJMOSFETs and DT2 will be manufactured and characterized in terms of performance (electrical, thermal) and robustness.